Large bearing capacity
High precision
Large displacement
Parameters:
Type P93.X100L P93.X100K Units
Active axes X X
Sensor LVDT LVDT
Nominal travel range(0~+120V) 100 100 μm±20%
Max. travel range(-20~+150V) 120 120 μm±20%
Resolution 20 10 nm
Closed-loop linearity 0.15 - %F.S.
Repeatability 0.05 - %F.S.
Unloaded response frequency 200 200 Hz±20%
Max load capacity 20 20 kg
El.capacitance 15 15 μF±20%
Material steel steel
Weight 3.5 3.5 Kg±5%
Cable length 1.5 1.5 m±10mm
High precision
Large displacement
Parameters:
Type P93.X100L P93.X100K Units
Active axes X X
Sensor LVDT LVDT
Nominal travel range(0~+120V) 100 100 μm±20%
Max. travel range(-20~+150V) 120 120 μm±20%
Resolution 20 10 nm
Closed-loop linearity 0.15 - %F.S.
Repeatability 0.05 - %F.S.
Unloaded response frequency 200 200 Hz±20%
Max load capacity 20 20 kg
El.capacitance 15 15 μF±20%
Material steel steel
Weight 3.5 3.5 Kg±5%
Cable length 1.5 1.5 m±10mm
Main Products
piezo actuators,nanopositioning stages, piezo drivers