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JEL 3 - AXEX Cylinder Type Coordinate Clean Robot

Product ID: SHR3000

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SHR 3000 series is the 3 - axis cylinder type coordinate robot designed to be used in super clean room, it can be use for IC wafer handling in the semiconductor equipment, testing instruments and others.
Features
  • Applicable to 0.1um, class 1, super clean room
  • Speedy & smooth motion
  • Easy control.
  • Easy maintenance
  • Versatile

Main Products

ex series actuator & controller, ia - 12e/f type servo cylinoer sa series servo actuator, table top type actuator