Specifications

Application for Stainless Steel Bellows:   Application for edged welded Bellows: Accumulators Beam Lines Cassette Elevators Chamber-Lift Bellows Connectors Couplings - Flexible & Torque Flexible Connectors/Expansion Joints Gas Line Flexible Connectors Gate Valves Heater Assemblies Hermetic Feedthroughs Leak Detectors Lifters Pedestal Lifts Pin Lift Actuators Reservoirs/Volume Compensators Sensors Slit Valves Spindle Assemblies Valve Door Modules Valve Stem Seals Vibration Isolators Wafer-Lift Bellows Wafer Handlers Wafer Orienters X-Y-Z Manipulators 1.Expansion Joint(EJMA Standard)2.Flexible Joint(Manipulator Feedthrough)3.Accumulator4.Proportional Tempture Control5.Packingless Valve, Aseptic Bellows Valve6.Mechanical Sealing7.Rotary seal housing8.Pressure switch9.Remote flow control10.Flexible coupling11.Steam trap   1.Expansion Joint(EJMA Standard)2.Flexible Joint(Manipulator Feedthrough)3.Accumulator4.Proportional Tempture Control5.Packingless Valve, Aseptic Bellows Valve6.Mechanical Sealing7.Rotary seal housing8.Pressure switch9.Remote flow control10.Flexible coupling11.Steam trap

Certificate

• EJMA / SEMI